| 12371779 |
Reaction chamber comprising a rotating element for the deposition of a semiconductor material |
Danilo Crippa, Maurilio Meschia, Yuichiro Tokuda |
2025-07-29 |
| 12331423 |
Reaction chamber for a deposition reactor with interspace and lower closing element and reactor |
Danilo Crippa, Maurilio Meschia, Silvio Preti, Yuichiro Tokuda |
2025-06-17 |
| 10697087 |
Susceptor with supporting element |
Danilo Crippa, Laura Gobbo, Marco Mauceri, Vincenzo Ogliari, Franco Preti +2 more |
2020-06-30 |
| 10392723 |
Reaction chamber for epitaxial growth with a loading/unloading device and reactor |
Danilo Crippa, Laura Gobbo, Marco Mauceri, Vincenzo Ogliari, Franco Preti +2 more |
2019-08-27 |
| 10211085 |
Tool for manipulating substrates, manipulation method and epitaxial reactor |
Vincenzo Ogliari, Franco Preti |
2019-02-19 |