Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11834753 | Reactor for epitaxial deposition with a heating inductor with movable turns | Silvio Preti, Franco Preti | 2023-12-05 |
| 11377754 | Epitaxial deposition reactor with reflector external to the reaction chamber and cooling method of a susceptor and substrates | Silvio Preti, Franco Preti | 2022-07-05 |
| 10815585 | Susceptor with substrate clamped by underpressure, and reactor for epitaxial deposition | Silvio Preti | 2020-10-27 |
| 10697087 | Susceptor with supporting element | Francesco Corea, Danilo Crippa, Laura Gobbo, Marco Mauceri, Franco Preti +2 more | 2020-06-30 |
| 10392723 | Reaction chamber for epitaxial growth with a loading/unloading device and reactor | Francesco Corea, Danilo Crippa, Laura Gobbo, Marco Mauceri, Franco Preti +2 more | 2019-08-27 |
| 10211085 | Tool for manipulating substrates, manipulation method and epitaxial reactor | Francesco Corea, Franco Preti | 2019-02-19 |
| 7314526 | Reaction chamber for an epitaxial reactor | Franco Preti, Giuseppe Tarenzi | 2008-01-01 |
| 6991420 | Tool for handling wafers and epitaxial growth station | Franco Preti | 2006-01-31 |
| 6648974 | Device and method for handling substrates by means of a self-leveling vacuum system in epitaxial induction | Vittorio Pozzetti, Franco Preti | 2003-11-18 |