Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6984415 | Delivery systems for gases for gases via the sublimation of solid precursors | Deborah A. Neumayer, John J. Yurkas | 2006-01-10 |
| 6107199 | Method for improving the morphology of refractory metal thin films | Russell D. Allen, Cevdet I. Noyan, John J. Yurkas | 2000-08-22 |