Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6585907 | Method for manufacturing a shield for an inductively-couple plasma apparatus | Jin-Man Kim, Baik-Soon Choi, Hun Cha | 2003-07-01 |
| 6499492 | Plasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaning | Sung-bum Cho, Hak-pil Kim, Baik-Soon Choi | 2002-12-31 |
| 6335284 | Metallization process for manufacturing semiconductor devices | Baik-Soon Choi, Jae-saeng Lee, Sung-bum Cho | 2002-01-01 |
| 6251241 | Inductive-coupled plasma apparatus employing shield and method for manufacturing the shield | Jin-Man Kim, Baik-Soon Choi, Hun Cha | 2001-06-26 |
| 6179955 | Dry etching apparatus for manufacturing semiconductor devices | Sung-bum Cho, Baik-Soon Choi, Young-Koo Lee | 2001-01-30 |
| 6146492 | Plasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaning method | Sung-bum Cho, Hak-pil Kim, Baik-Soon Choi | 2000-11-14 |