Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7884024 | Apparatus and method for optical interference fringe based integrated circuit processing | Chun-Cheng Tsao, Theodore Lundquist, Rajesh Jain | 2011-02-08 |
| 7697146 | Apparatus and method for optical interference fringe based integrated circuit processing | Chun-Cheng Tsao, Theodore Lundquist | 2010-04-13 |
| 7488937 | Method and apparatus for the improvement of material/voltage contrast | William B. Thompson | 2009-02-10 |
| 7135123 | Method and system for integrated circuit backside navigation | Mark Thompson, Theodore Lundquist, William B. Thompson, Catherine Kardach | 2006-11-14 |
| 7115426 | Method and apparatus for addressing thickness variations of a trench floor formed in a semiconductor substrate | Patricia Le Coupanec, Theodore Lundquist, William B. Thompson, Mark Thompson, Lokesh Johri | 2006-10-03 |
| 7036109 | Imaging integrated circuits with focused ion beam | Chun-Cheng Tsao, Theodore Lundquist, William B. Thompson, Eugene A. Delenia | 2006-04-25 |
| 6955930 | Method for determining thickness of a semiconductor substrate at the floor of a trench | Chun-Cheng Tsao | 2005-10-18 |
| 6855622 | Method and apparatus for forming a cavity in a semiconductor substrate using a charged particle beam | Mark Thompson | 2005-02-15 |