Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4794087 | Circuit writing process | Bernard Despax | 1988-12-27 |
| 4331504 | Etching process with vibrationally excited SF.sub.6 | Tung J. Chuang, John W. Coburn | 1982-05-25 |
| 4226896 | Plasma method for forming a metal containing polymer | John W. Coburn | 1980-10-07 |