Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9881122 | Overlay sampling reduction | Hariharasudhan Kathiresan | 2018-01-30 |
| 9091943 | Asymmetric reticle heating of multilayer reticles eliminated by dummy exposures and related methods | Arthur Hotzel, Matthias Ruhm | 2015-07-28 |
| 8352886 | Method for the reproducible determination of the position of structures on a mask with a pellicle frame | Frank Laske, Christian Enkrich | 2013-01-08 |