Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5828036 | Method and apparatus for reflowing and annealing borophosphosilicate glass | Chen-Chiu Hsue | 1998-10-27 |
| 5669768 | Apparatus for adjusting a gas injector of furnace | Yu-Tsai Lin, Ben Chen | 1997-09-23 |
| 5665632 | Stress relaxation in dielectric before metalization | Water Lur | 1997-09-09 |
| 5661049 | Stress relaxation in dielectric before metallization | Water Lur | 1997-08-26 |
| 5658833 | Method and dummy disc for uniformly depositing silicon nitride | Shih-Ching Chen | 1997-08-19 |
| 5640041 | Stress relaxation in dielectric before metallization | Water Lur | 1997-06-17 |
| 5516720 | Stress relaxation in dielectric before metallization | Water Lur | 1996-05-14 |
| 5461011 | Method for reflowing and annealing borophosphosilicate glass to prevent BPO.sub.4 crystal formation | Chen-Chiu Hsue | 1995-10-24 |