Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6942814 | Methods of forming integrated optoelectronic devices | Robert L. Wood | 2005-09-13 |
| 6760144 | Articulated MEMS electrostatic rotary actuator | Ramaswamy Mahadevan, Vijayakumar R. Dhuler, Robert L. Wood | 2004-07-06 |
| 6677695 | MEMS electrostatic actuators with reduced actuation voltage | Vijayakumar R. Dhuler | 2004-01-13 |
| 6596147 | Methods of overplating surfaces of microelectromechanical structure | Robert L. Wood, Ramaswamy Mahadevan | 2003-07-22 |
| 6542656 | Add-drop optical switches including parallel fixed and movable reflectors and methods of fabricating same | — | 2003-04-01 |
| 6535318 | Integrated optoelectronic devices having pop-up mirrors therein and methods of forming and operating same | Robert L. Wood | 2003-03-18 |
| 6496351 | MEMS device members having portions that contact a substrate and associated methods of operating | Ramaswamy Mahadevan | 2002-12-17 |
| 6491404 | Microelectromechanical apparatus with tiltable bodies including variable tilt-stop engaging portions and methods of operation and fabrication therefor | — | 2002-12-10 |
| 6490382 | MicroElectroMechanical optical cross-connect switches having reduced numbers of reflectors therein and methods of operating same | — | 2002-12-03 |
| 6445842 | Microelectromechanical optical cross-connect switches including mechanical actuators and methods of operating same | Vijayakumar R. Dhuler | 2002-09-03 |
| 6428173 | Moveable microelectromechanical mirror structures and associated methods | Vijayakumar R. Dhuler, Mark D. Walters, Allen Cowen | 2002-08-06 |
| 6410361 | Methods of fabricating in-plane MEMS thermal actuators | Vijayakumar R. Dhuler, Allen Cowen | 2002-06-25 |
| 6400550 | Variable capacitors including tandem movers/bimorphs and associated operating methods | Robert L. Wood, Vivek Agrawal, Ramaswamy Mahadevan | 2002-06-04 |
| 6396975 | MEMS optical cross-connect switch | Robert L. Wood, Ramaswamy Mahadevan | 2002-05-28 |
| 6367252 | Microelectromechanical actuators including sinuous beam structures | Vijayakumar R. Dhuler, Allen Cowen, Ramaswamy Mahadevan, Robert L. Wood | 2002-04-09 |
| 6366186 | Mems magnetically actuated switches and associated switching arrays | Ramaswamy Mahadevan | 2002-04-02 |
| 6360539 | Microelectromechanical actuators including driven arched beams for mechanical advantage | Vijayakumar R. Dhuler, Allen Cowen, Ramaswamy Mahadevan, Robert L. Wood | 2002-03-26 |
| 6351580 | Microelectromechanical devices having brake assemblies therein to control movement of optical shutters and other movable elements | Vijayakumar R. Dhuler | 2002-02-26 |
| 6333583 | Microelectromechanical systems including thermally actuated beams on heaters that move with the thermally actuated beams | Ramaswamy Mahadevan, Robert L. Wood, Allen Cowen | 2001-12-25 |
| 6327855 | Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods | Vijayakumar R. Dhuler | 2001-12-11 |
| 6275320 | MEMS variable optical attenuator | Vijayakumar R. Dhuler, Ramaswamy Mahadevan, Mark D. Walters, Robert L. Wood | 2001-08-14 |
| 6236139 | Temperature compensated microelectromechanical structures and related methods | Robert L. Wood, Ramaswamy Mahadevan | 2001-05-22 |
| 6229684 | Variable capacitor and associated fabrication method | Allen Cowen, Vijayakumar R. Dhuler, David A. Koester, Ramaswamy Mahadevan | 2001-05-08 |
| 6218762 | Multi-dimensional scalable displacement enabled microelectromechanical actuator structures and arrays | Vijayakumar R. Dhuler | 2001-04-17 |
| 6211598 | In-plane MEMS thermal actuator and associated fabrication methods | Vijayakumar R. Dhuler, Allen Cowen | 2001-04-03 |