| 9029215 |
Method of making an insulated gate semiconductor device having a shield electrode structure |
Zia Hossain, Gordon M. Grivna, Peter McGrath, Balaji Padmanabhan, Prasad Venkatraman |
2015-05-12 |
| 8685633 |
Method for optimizing wafer edge patterning |
David J. Sturtevant |
2014-04-01 |
| 8685822 |
Semiconductor component and method of manufacture |
Peter A. Burke, Brian Pratt |
2014-04-01 |
| 7897462 |
Method of manufacturing semiconductor component with gate and shield electrodes in trenches |
Peter A. Burke, Brian Pratt |
2011-03-01 |
| 7638245 |
Mask set for variable mask field exposure |
David J. Sturtevant, Ann I. Kang |
2009-12-29 |
| 7550236 |
Multi wavelength mask for multi layer printing on a process substrate |
Phong Do, Douglas M. Horn |
2009-06-23 |
| 7018753 |
Variable mask field exposure |
David J. Sturtevant, Ann I. Kang |
2006-03-28 |
| 7016054 |
Lithography line width monitor reflecting chip-wide average feature size |
Robert Muller, Mark C. Simmons |
2006-03-21 |
| 6861183 |
Scatter dots |
— |
2005-03-01 |
| 6818365 |
Feed forward leveling |
— |
2004-11-16 |
| 5825105 |
Magnetic levitation and systems for the support and conveyance of useful payloads |
John Barber |
1998-10-20 |