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Sensor module for detecting a process environment in semiconductor equipment, a semiconductor manufacturing apparatus, and a method of manufacturing a semiconductor device |
Young Ho Hwang, Sang-Yoon Soh, Dae Hee Lee, Dae Sung Jung, Jong-min Song |
2020-04-21 |
| 9501013 |
Heating member and fusing apparatus including the same |
Sang-eui LEE, Dong-earn KIM, Ha-Jin Kim, Sung Hoon Park, Min-jong Bae +3 more |
2016-11-22 |
| 9348280 |
Heating composite, and heating apparatus and fusing apparatus including the same |
Sang-eui LEE, In-Taek Han, Yoon Chul SON, Ha-Jin Kim, Dong-earn KIM +1 more |
2016-05-24 |
| 9272902 |
Resistance heating composition, heating composite using the composition, method of preparing the heating composite, and heating apparatus and fusing apparatus using the same |
Dong-earn KIM, Ha-Jin Kim, Sung Hoon Park, Min-jong Bae, Yoon Chul SON +3 more |
2016-03-01 |
| 9165701 |
Resistance heating element and heating member and fusing device employing the same |
Kun-mo CHU, Dong-earn KIM, Sang-eui LEE, Ha-Jin Kim, Sung Hoon Park +2 more |
2015-10-20 |
| 9052655 |
Heating member including a base polymer and fusing apparatus including the same |
Yoon Chul SON, Dong-earn KIM, Ha-Jin Kim, Sung Hoon Park, Min-jong Bae +3 more |
2015-06-09 |
| 9037063 |
Method of forming thin resistive heating layer, heating member including the thin resistive heating layer, and fusing unit including the heating member |
Sang-eui LEE, Ha-Jin Kim, Dong-earn KIM, Sung Hoon Park, Min-jong Bae +2 more |
2015-05-19 |
| 9002253 |
Heating member and fusing device including the same |
Yoon Chul SON, Dong-earn KIM, Ha-Jin Kim, Sung Hoon Park, Min-jong Bae +2 more |
2015-04-07 |