Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272535 | Spectroscopic analysis method, method for fabricating semiconductor device using the same, and substrate process system using the same | Se Jin Oh, Tae Hyun Kim, Sang Ki Nam, Jae-Ho Jang, Jin Kyou Choi | 2025-04-08 |
| 11605567 | Method of monitoring a semiconductor device fabrication process and method of fabricating a semiconductor device using the same | Jitae Park, Youngjoo Lee, Taekyun Kang, Aekyung Kim, Hyowon Bae +3 more | 2023-03-14 |