Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8987691 | Ion implanter and ion implant method thereof | Zhimin Wan, John D. Pollock | 2015-03-24 |
| 8669539 | Implant method and implanter by using a variable aperture | Zhimin Wan, John D. Pollock, Causon Ko-Chuan Jen | 2014-03-11 |
| 8581217 | Method for monitoring ion implantation | Cheng-Hui Shen | 2013-11-12 |
| 8168962 | Method and apparatus for uniformly implanting a wafer with an ion beam | Cheng-Hui Shen | 2012-05-01 |
| 8040124 | Method and apparatus for monitoring leakage current of a faraday cup | Steven Fong | 2011-10-18 |