Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7577537 | Providing a dynamic sampling plan for integrated metrology | Gary W. Behm, Emily M. Hwang, Yue Li, Teresita Q. Magtoto | 2009-08-18 |
| 7509186 | Method and system for reducing the variation in film thickness on a plurality of semiconductor wafers having multiple deposition paths in a semiconductor manufacturing process | Yue Li, Gary W. Behm, James V. Iannucci | 2009-03-24 |
| 7398172 | Method and system of providing a dynamic sampling plan for integrated metrology | Gary W. Behm, Emily M. Hwang, Yue Li, Teresita Q. Magtoto | 2008-07-08 |