Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7899566 | Factory level and tool level advanced process control systems integration implementation | Gary W. Behm, Emily M. Hwang, Yue Li | 2011-03-01 |
| 7700378 | Method and system for line-dimension control of an etch process | Gary W. Behm, Rajiv Ranade | 2010-04-20 |
| 7577537 | Providing a dynamic sampling plan for integrated metrology | Gary W. Behm, Emily M. Hwang, Yue Li, Derek C. Stoll | 2009-08-18 |
| 7489980 | Factory level and tool level advanced process control systems integration implementation | Gary W. Behm, Emily M. Hwang, Yue Li | 2009-02-10 |
| 7398172 | Method and system of providing a dynamic sampling plan for integrated metrology | Gary W. Behm, Emily M. Hwang, Yue Li, Derek C. Stoll | 2008-07-08 |
| 7291285 | Method and system for line-dimension control of an etch process | Gary W. Behm, Rajiv Ranade | 2007-11-06 |
| 7113845 | Integration of factory level and tool level advanced process control systems | Gary W. Behm, Yue Li, Emily M. Hwang | 2006-09-26 |