DR

Denis A. Robitaille

AT Axcelis Technologies: 2 patents #105 of 300Top 35%
Overall (All Time): #1,913,220 of 4,157,543Top 50%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10714296 Ion source with tailored extraction shape Patrick T. Heres 2020-07-14
8450701 Vacuum system cold trap filter William P. Reynolds, James Gregg, William Davis Lee 2013-05-28