PH

Patrick T. Heres

AT Axcelis Technologies: 1 patents #165 of 300Top 60%
Overall (All Time): #2,803,419 of 4,157,543Top 70%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10714296 Ion source with tailored extraction shape Denis A. Robitaille 2020-07-14