Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7964038 | Apparatus for improved azimuthal thermal uniformity of a substrate | Kailash Kiran Patalay, Jean R. Vatus | 2011-06-21 |
| 6905542 | Waveguides such as SiGeC waveguides and method of fabricating the same | Arkadii V. Samoilov | 2005-06-14 |