Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249490 | Single crystal metal oxide plasma chamber component | Lin Xu, Douglas DETERT, John Daugherty, Pankaj HAZARIKA, Satish SRINIVASAN +5 more | 2025-03-11 |
| 12198902 | Laminated aerosol deposition coating for aluminum components for plasma processing chambers | Lin Xu, John Daugherty, Satish SRINIVASAN | 2025-01-14 |
| 12129569 | Method for conditioning semiconductor processing chamber components | Lin Xu, John Daugherty, Hong Shih, Satish SRINIVASAN, Yuanping Song +3 more | 2024-10-29 |
| 11684930 | Method of optimizing milling process using chemical imaging | Mark Boatwright, Elieser S. Posner | 2023-06-27 |
| 11087961 | Quartz component with protective coating | Lin Xu, Robin KOSHY, John Daugherty, Satish SRINIVASAN | 2021-08-10 |
| 10725485 | System and method for calculating substrate support temperature | Alexander Bleakie, Jacob Frederick Theisen | 2020-07-28 |