Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6736992 | Chemical mechanical planarization of low dielectric constant materials | Fan Zhang, Feng Q. Liu | 2004-05-18 |
| 6610114 | Oxidizing polishing slurries for low dielectric constant materials | Neil H. Hendricks, Paul Schilling, Tian-An Chen | 2003-08-26 |
| 6416685 | Chemical mechanical planarization of low dielectric constant materials | Fan Zhang, Feng Q. Liu | 2002-07-09 |