Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11101154 | Method of processing target substrate | — | 2021-08-24 |
| 10186422 | Substrate processing apparatus | Naohide Ito, Keiji Osada | 2019-01-22 |
| 9845531 | Substrate processing system | Junichi Ogawa | 2017-12-19 |
| 9828675 | Processing apparatus and processing method | Naohide Ito, Keiji Osada | 2017-11-28 |
| 9646864 | Substrate processing system and substrate transfer control method | — | 2017-05-09 |
| 8255072 | Substrate processing apparatus, program, storage medium and conditioning necessity determining method | — | 2012-08-28 |
| 7987012 | Control device of substrate processing apparatus and control program therefor | Masayuki Hirose | 2011-07-26 |
| 7690898 | Control valve for variable displacement compressor | Yoskiyuki Kume, Toru Watanuki | 2010-04-06 |
| 7266418 | Substrate processing apparatus, history information recording method, history information recording program, and history information recording system | Youichi Nakayama | 2007-09-04 |
| 7128304 | Control valve for variable capacity compressors | Toshikio Okii | 2006-10-31 |