Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11345852 | Etchant composition | Angela Hecke, Hongzhi Wang | 2022-05-31 |
| 10483010 | Reduction of surface and embedded substrate charge by controlled exposure to vacuum ultraviolet (VUV) light in low-oxygen environment | Rafal Dylewicz, Reinhold SCHWARZENBACHER, Xia Man, Kenichi Sano, Milan Pliska | 2019-11-19 |