Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141208 | Vacuum processing apparatus | Ryo ISHIZAKI, Naoki Kubota, Kyosuke Sugi | 2018-11-27 |
| 9346171 | Substrate transport apparatus, and system and method for manufacturing electronic device | Kazuhito Watanabe, Yukihito Tashiro, Satoshi Nakamura, Toshiaki Sasaki, Naoyuki Nozawa | 2016-05-24 |
| 8912697 | Vacuum actuator including a stator forming a part of a vacuum partition wall | Kazuhito Watanabe, Yukihito Tashiro, Naoyuki Nozawa, Hideo Mano | 2014-12-16 |