Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9847632 | Cable termination method and apparatus | Daniel F. Zivi | 2017-12-19 |
| 7163587 | Reactor assembly and processing method | David Ferris | 2007-01-16 |
| 6969227 | Wafer transport apparatus | Daniel Richardson | 2005-11-29 |
| 6877946 | Wafer transport apparatus | Daniel Richardson | 2005-04-12 |
| 6782843 | Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing system | Daniel Richardson | 2004-08-31 |
| 6663333 | Wafer transport apparatus | Daniel Richardson | 2003-12-16 |
| 6635117 | Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing system | Daniel Richardson | 2003-10-21 |
| 6537419 | Gas distribution plate assembly for providing laminar gas flow across the surface of a substrate | — | 2003-03-25 |
| 6259072 | Zone controlled radiant heating system utilizing focused reflector | Andre Cardoso | 2001-07-10 |
| 6040518 | Wafer temperature monitoring device utilizing flexible thermocouple | — | 2000-03-21 |