Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7220937 | Plasma reactor with overhead RF source power electrode with low loss, low arcing tendency and low contamination | Jennifer Y. Sun, Senh Thach, Yan Ye | 2007-05-22 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7220937 | Plasma reactor with overhead RF source power electrode with low loss, low arcing tendency and low contamination | Jennifer Y. Sun, Senh Thach, Yan Ye | 2007-05-22 |