Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6030666 | Method for microwave plasma substrate heating | James Lam | 2000-02-29 |
| 5913140 | Method for reduction of plasma charging damage during chemical vapor deposition | Gregory A. Roche, Vahid Vahedi | 1999-06-15 |
| 5869149 | Method for preparing nitrogen surface treated fluorine doped silicon dioxide films | Dean R. Denison, Ajay Saproo | 1999-02-09 |
| 5203631 | Narrow spectral band pyrometry | Michelangelo Delfino | 1993-04-20 |