Issued Patents All Time
Showing 25 most recent of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7083497 | Polishing pad with built-in optical sensor | Gregory Barbour, Ben Smedley, Stephen H. Wolf | 2006-08-01 |
| 6986701 | Polishing pad with built-in optical sensor | Gregory Barbour, Ben Smedley, Stephen H. Wolf | 2006-01-17 |
| 6976901 | In situ feature height measurement | Greg Barbour | 2005-12-20 |
| 6945856 | Subaperture chemical mechanical planarization with polishing pad conditioning | John M. Boyd, Michael S. Lacy | 2005-09-20 |
| 6921719 | Method of preparing whole semiconductor wafer for analysis | Allan Paterson | 2005-07-26 |
| 6887133 | Pad support method for chemical mechanical planarization | — | 2005-05-03 |
| 6885206 | Device for supporting thin semiconductor wafers | — | 2005-04-26 |
| 6855030 | Modular method for chemical mechanical planarization | — | 2005-02-15 |
| 6808443 | Projected gimbal point drive | — | 2004-10-26 |
| 6739945 | Polishing pad with built-in optical sensor | Gregory Barbour, Ben Smedley, Stephen H. Wolf | 2004-05-25 |
| 6692339 | Combined chemical mechanical planarization and cleaning | — | 2004-02-17 |
| 6629874 | Feature height measurement during CMP | — | 2003-10-07 |
| 6602121 | Pad support apparatus for chemical mechanical planarization | — | 2003-08-05 |
| 6551179 | Hard polishing pad for chemical mechanical planarization | — | 2003-04-22 |
| 6547651 | Subaperture chemical mechanical planarization with polishing pad conditioning | John M. Boyd, Michael S. Lacy | 2003-04-15 |
| 6527621 | Pad retrieval apparatus for chemical mechanical planarization | — | 2003-03-04 |
| 6520843 | High planarity chemical mechanical planarization | — | 2003-02-18 |
| 6517419 | Shaping polishing pad for small head chemical mechanical planarization | — | 2003-02-11 |
| 6514129 | Multi-action chemical mechanical planarization device and method | — | 2003-02-04 |
| 6514121 | Polishing chemical delivery for small head chemical mechanical planarization | — | 2003-02-04 |
| 6511368 | Spherical drive assembly for chemical mechanical planarization | — | 2003-01-28 |
| 6495463 | Method for chemical mechanical polishing | — | 2002-12-17 |
| 6464574 | Pad quick release device for chemical mechanical planarization | — | 2002-10-15 |
| 6450860 | Pad transfer apparatus for chemical mechanical planarization | — | 2002-09-17 |
| 6379235 | Wafer support for chemical mechanical planarization | — | 2002-04-30 |