| 9745119 |
Reticle pod |
Steven P. Kolbow, Kevin McMullen, Anthony Mathius Tieben, Matthew Kusz, John Lystad |
2017-08-29 |
| 8727125 |
Substrate container with fluid-sealing flow passageway |
Anthony Mathius Tieben, John Lystad |
2014-05-20 |
| 8613359 |
Reticle pod |
Steven P. Kolbow, Kevin McMullen, Anthony Mathius Tieben, Matthew Kusz, Christian Andersen +4 more |
2013-12-24 |
| 8231005 |
Reticle pod |
Steven P. Kolbow, Kevin McMullen, Anthony Mathius Tieben, Matthew Kusz, Christian Andersen +4 more |
2012-07-31 |
| 7607543 |
Reticle pod with isolation system |
Barry Gregerson, Stephen Sumner, Brian Wiseman, Anthony Mathius Tieben, Justin Strike |
2009-10-27 |
| 7528936 |
Substrate container with pressure equalization |
Barry Gregerson, Stephen Sumner, Brian Wiseman, Anthony Mathius Tieben, Justin Strike |
2009-05-05 |
| 7400383 |
Environmental control in a reticle SMIF pod |
Anthony Simpson, William Goodwin, Oleg P. Kishkovich, Thomas B. Kielbaso, Frank Manganiello |
2008-07-15 |
| 7328727 |
Substrate container with fluid-sealing flow passageway |
Anthony Mathius Tieben, John Lystad |
2008-02-12 |
| 7325698 |
Wafer container door with particulate collecting structure |
— |
2008-02-05 |
| 7216655 |
Wafer container washing apparatus |
Barry Gregerson |
2007-05-15 |
| 6926017 |
Wafer container washing apparatus |
— |
2005-08-09 |
| 6248177 |
Method of cleaning a wafer carrier |
— |
2001-06-19 |