| 8776841 |
System for purging reticle storage |
Xavier Gabarre, William Goodwin, James Lo, Troy Scoggins |
2014-07-15 |
| RE44536 |
Filters employing both acidic polymers and physical-adsorption media |
Devon Kinkead, Anatoly Grayfer, William Goodwin, David Ruede |
2013-10-15 |
| 8398753 |
System and method for removing contaminants |
John E. Sergi, John C. Gaudreau, William Goodwin, Devon Kinkead |
2013-03-19 |
| 7922791 |
Filtering system for a semiconductor processing tool |
Anatoly Grayfer |
2011-04-12 |
| 7540901 |
Filters employing both acidic polymers and physical-adsorption media |
Devon Kinkead, Anatoly Grayfer, William Goodwin, David Ruede |
2009-06-02 |
| 7400383 |
Environmental control in a reticle SMIF pod |
David L. Halbmaier, Anthony Simpson, William Goodwin, Thomas B. Kielbaso, Frank Manganiello |
2008-07-15 |
| 7329308 |
Air handling and chemical filtration system and method |
William Goodwin, Anatoly Grayfer |
2008-02-12 |
| 7092077 |
System and method for monitoring contamination |
Anatoly Grayfer, William Goodwin, Devon Kinkead |
2006-08-15 |
| 7022164 |
Filters employing porous strongly acidic polymers |
Robert W. Rezuke, Devon Kinkead |
2006-04-04 |
| 7014693 |
Filters employing both acidic polymers and physical-adsorption media |
Devon Kinkead, Anatoly Grayfer, William Goodwin, David Ruede |
2006-03-21 |
| 6855557 |
Detection of base contaminants in gas samples |
William Goodwin |
2005-02-15 |
| 6761753 |
Methods using filters employing both acidic polymers and physical-adsorption media |
Devon Kinkead, Anatoly Grayfer, William Goodwin, David Ruede |
2004-07-13 |
| 6759254 |
System and method for determining and controlling contamination |
Devon Kinkead, Mark C. Phelps, William Goodwin |
2004-07-06 |
| 6740147 |
Filters employing both acidic polymers and physical-adsorption media |
Devon Kinkead, Anatoly Grayfer, William Goodwin, David Ruede |
2004-05-25 |
| 6620630 |
System and method for determining and controlling contamination |
Anatoly Grayfer, William Goodwin, Devon Kinkead |
2003-09-16 |
| 6610128 |
Filters employing porous strongly acidic polymers |
— |
2003-08-26 |
| 6447584 |
Filters employing porous strongly acidic polymers |
Robert W. Rezuke, Devon Kinkhead |
2002-09-10 |
| 6296806 |
Protection of semiconductor fabrication and similar sensitive processes |
Devon Kinkead |
2001-10-02 |
| 6207460 |
Detection of base contaminants in gas samples |
William Goodwin |
2001-03-27 |
| 6096267 |
System for detecting base contaminants in air |
Devon Kinkead |
2000-08-01 |