| 12371779 |
Reaction chamber comprising a rotating element for the deposition of a semiconductor material |
Francesco Corea, Maurilio Meschia, Yuichiro Tokuda |
2025-07-29 |
| 12331423 |
Reaction chamber for a deposition reactor with interspace and lower closing element and reactor |
Francesco Corea, Maurilio Meschia, Silvio Preti, Yuichiro Tokuda |
2025-06-17 |
| 10697087 |
Susceptor with supporting element |
Francesco Corea, Laura Gobbo, Marco Mauceri, Vincenzo Ogliari, Franco Preti +2 more |
2020-06-30 |
| 10392723 |
Reaction chamber for epitaxial growth with a loading/unloading device and reactor |
Francesco Corea, Laura Gobbo, Marco Mauceri, Vincenzo Ogliari, Franco Preti +2 more |
2019-08-27 |
| 7615121 |
Susceptor system |
Giacomo Maccalli, Gianluca Valente, Olle Kordina, Franco Preti |
2009-11-10 |
| 7488922 |
Susceptor system |
Giacomo Maccalli, Olle Kordina, Gianluca Valente, Franco Preti |
2009-02-10 |
| 7387687 |
Support system for a treatment apparatus |
Natale Speciale, Gianluca Valente, Franco Preti |
2008-06-17 |