Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5530550 | Optical wafer positioning system | Mehrdad Nikoonahad, Philip R. Rigg, Keith Wells | 1996-06-25 |
| 5030007 | System for vibration isolation of FT-IR interferometers | Mark S. Roth | 1991-07-09 |