Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9679751 | Chamber filler kit for plasma etch chamber useful for fast gas switching | Jon McChesney, Theo Panagopoulos, Alex Paterson | 2017-06-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9679751 | Chamber filler kit for plasma etch chamber useful for fast gas switching | Jon McChesney, Theo Panagopoulos, Alex Paterson | 2017-06-13 |