Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6433553 | Method and apparatus for eliminating displacement current from current measurements in a plasma processing system | Matthew J. Goeckner | 2002-08-13 |
| 5572038 | Charge monitor for high potential pulse current dose measurement apparatus and method | Terry Sheng, Charles Cooper, Susan Felch | 1996-11-05 |