Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7203562 | Process monitoring system for lithography lasers | Parthiv Patel, Joseph Conway, Muljadi Tantra, Jeffrey W. Moen, Jason R. Carlesi +2 more | 2007-04-10 |
| 6687562 | Process monitoring system for lithography lasers | Parthiv Patel, Joseph Conway, Muljadi Tantra, Jeffrey W. Moen, Jason R. Carlesi +2 more | 2004-02-03 |