Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11615897 | Microscopic system for testing structures and defects on EUV lithography photomasks | Rainer Lebert, Thomas Missalla, Andreas Biermanns-Foeth, Christian Piel | 2023-03-28 |