Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8715910 | Method for exposing an area on a substrate to a beam and photolithographic system | Vlad Temchenko, Jens Schneider, Yves Rody | 2014-05-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8715910 | Method for exposing an area on a substrate to a beam and photolithographic system | Vlad Temchenko, Jens Schneider, Yves Rody | 2014-05-06 |