Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10991700 | Methods of forming semiconductor devices using aspect ratio dependent etching effects, and related memory devices and electronic systems | Song Guo, Sanh D. Tang, Shivani Srivastava | 2021-04-27 |
| 10593678 | Methods of forming semiconductor devices using aspect ratio dependent etching effects, and related semiconductor devices | Song Guo, Sanh D. Tang, Shivani Srivastava | 2020-03-17 |
| 8715910 | Method for exposing an area on a substrate to a beam and photolithographic system | Chinteong Lim, Jens Schneider, Yves Rody | 2014-05-06 |
| 7910265 | Reticle for use in a semiconductor lithographic system and method for modifying the same | Jens Schneider | 2011-03-22 |
| 7880863 | Lithography system with illumination monitor | — | 2011-02-01 |
| 7738160 | Optical components, illumination systems, and methods | Jens Schneider | 2010-06-15 |