Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7238083 | Wafer carrier with pressurized membrane and retaining ring actuator | John Fuhriman, Bill Kalenian, Larry Spiegel | 2007-07-03 |
| 7131892 | Wafer carrier with pressurized membrane and retaining ring actuator | John Fuhriman, Bill Kalenian, Larry Spiegel | 2006-11-07 |
| 7033252 | Wafer carrier with pressurized membrane and retaining ring actuator | John Fuhriman, Bill Kalenian, Larry Spiegel | 2006-04-25 |