Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8288174 | Electrostatic post exposure bake apparatus and method | Benjamen M. Rathsack, Steven Scheer | 2012-10-16 |
| 7665917 | Heat treatment apparatus and methods for thermally processing a substrate using a pressurized gaseous environment | — | 2010-02-23 |