Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8535445 | Enhanced wafer carrier | Yuliy Rashkovsky | 2013-09-17 |
| 8518633 | Large area nanopatterning method and apparatus | Boris Kobrin, Igor Landau | 2013-08-27 |
| 7570368 | Method and apparatus for measuring the curvature of reflective surfaces | Mikhail Belousov | 2009-08-04 |
| 7452125 | Calibration wafer and method of calibrating in situ temperatures | Mikhail Belousov, Alexander I. Gurary | 2008-11-18 |
| 7275861 | Calibration wafer and method of calibrating in situ temperatures | Mikhail Belousov, Alexander I. Gurary | 2007-10-02 |