| 6488777 |
Semiconductor vacuum deposition system and method having a reel-to-reel substrate cassette |
Jeffrey Owen Heng |
2002-12-03 |
| 6427622 |
Hot wire chemical vapor deposition method and apparatus using graphite hot rods |
Scott W. Morrison, Jianping Xi |
2002-08-06 |
| 6258408 |
Semiconductor vacuum deposition system and method having a reel-to-reel substrate cassette |
Jeffrey Owen Heng |
2001-07-10 |
| 6214706 |
Hot wire chemical vapor deposition method and apparatus using graphite hot rods |
Scott W. Morrison, Jianping Xi |
2001-04-10 |
| 5252140 |
Solar cell substrate and process for its production |
Shigeyoshi Kobayashi, Susumu Yaba, Shinya Kikugawa, Stephen Muhl |
1993-10-12 |
| 5016562 |
Modular continuous vapor deposition system |
Bolko Von Roedern |
1991-05-21 |
| 4865999 |
Solar cell fabrication method |
Jianping Xi |
1989-09-12 |
| 4839312 |
Fluorinated precursors from which to fabricate amorphous semiconductor material |
Stanford R. Ovshinsky |
1989-06-13 |
| 4808462 |
Solar cell substrate |
Susumu Yaba, Christopher M. Walker, Stephen Muhl |
1989-02-28 |
| 4763602 |
Thin film deposition apparatus including a vacuum transport mechanism |
Bolko Von Roedern |
1988-08-16 |
| 4710786 |
Wide band gap semiconductor alloy material |
Stanford R. Ovshinsky |
1987-12-01 |
| 4703336 |
Photodetection and current control devices |
Stanford R. Ovshinsky |
1987-10-27 |
| 4520380 |
Amorphous semiconductors equivalent to crystalline semiconductors |
Stanford R. Ovshinsky |
1985-05-28 |
| 4469715 |
P-type semiconductor material having a wide band gap |
— |
1984-09-04 |
| 4441113 |
P-Type semiconductor material having a wide band gap |
— |
1984-04-03 |
| 4415760 |
Amorphous silicon solar cells incorporating an insulating layer in the body of amorphous silicon and a method of suppressing the back diffusion of holes into an N-type region |
— |
1983-11-15 |
| 4409605 |
Amorphous semiconductors equivalent to crystalline semiconductors |
Stanford R. Ovshinsky |
1983-10-11 |
| 4398054 |
Compensated amorphous silicon solar cell incorporating an insulating layer |
— |
1983-08-09 |
| 4396793 |
Compensated amorphous silicon solar cell |
— |
1983-08-02 |
| 4379943 |
Current enhanced photovoltaic device |
Chi C. Yang, Stanford R. Ovshinsky, David Adler |
1983-04-12 |
| 4226898 |
Amorphous semiconductors equivalent to crystalline semiconductors produced by a glow discharge process |
Stanford R. Ovshinsky |
1980-10-07 |
