Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5016562 | Modular continuous vapor deposition system | Arun Madan | 1991-05-21 |
| 4763602 | Thin film deposition apparatus including a vacuum transport mechanism | Arun Madan | 1988-08-16 |