Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6283134 | Apparatus for removing photo-resist | Hsi-Hsin Hong, Chi-Fa Ku | 2001-09-04 |
| 6153360 | Method of removing photo-resist | Hsi-Hsin Hong, Chi-Fa Ku | 2000-11-28 |
| 6007953 | Method of avoiding peeling on wafer edge and mark number | Tzung-Han Lee, Chi-Fa Ku, Chien-Li Kuo | 1999-12-28 |
| 5413963 | Method for depositing an insulating interlayer in a semiconductor metallurgy system | Po-Wen Yen, Her-Song Liaw | 1995-05-09 |