Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5773082 | Method for applying photoresist on wafer | Chi-Fa Ku, Chih-Hsing Hsin | 1998-06-30 |
| 5637186 | Method and monitor testsite pattern for measuring critical dimension openings | Chih-Chiang Liu, Hsi-Hsin Hong | 1997-06-10 |
| 5580701 | Process for elimination of standing wave effect of photoresist | Water Lur | 1996-12-03 |
| 5445989 | Method of forming device isolation regions | Water Lur | 1995-08-29 |
| 5413963 | Method for depositing an insulating interlayer in a semiconductor metallurgy system | Army Chung, Her-Song Liaw | 1995-05-09 |