Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11972948 | Adhesion layers for EUV lithography | Vandana Krishnamurthy, Yichen Liang, Hao-Chun Lee, Stephen Grannemann, Douglas J. Guerrero | 2024-04-30 |
| 11361967 | Underlayers for EUV lithography | Yichen Liang, Yubao Wang, Douglas J. Guerrero | 2022-06-14 |