Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12169178 | IC fabrication flow with dynamic sampling for measurement | Jonas Hoehenberger, Moritz Steinberg, Pietro Foglietti | 2024-12-17 |
| 7423729 | Method of monitoring the light integrator of a photolithography system | Alexander Urban, Holger Schwekendiek | 2008-09-09 |