Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12169178 | IC fabrication flow with dynamic sampling for measurement | Jonas Hoehenberger, Moritz Steinberg, Alexander Sirch | 2024-12-17 |
| 9090991 | Controlling an epitaxial growth process in an epitaxial reactor | Manfred Schiekofer, Robert J. Maier | 2015-07-28 |
| 8940093 | Method of controlling an epitaxial growth process in an epitaxial reactor | Manfred Schiekofer, Robert J. Maier | 2015-01-27 |