Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8532364 | Apparatus and method for detecting defects in wafer manufacturing | Alexander Urban, Peter Schaeffler, Andreas Pfeiffer | 2013-09-10 |
| 7423729 | Method of monitoring the light integrator of a photolithography system | Alexander Urban, Alexander Sirch | 2008-09-09 |