Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9324590 | Processing methods and apparatus with temperature distribution control | Mikhail Belousov, Vadim Boguslavskiy, Bojan Mitrovic | 2016-04-26 |
| 9273395 | Gas treatment systems | Bojan Mitrovic, Eric A. Armour | 2016-03-01 |
| 8980000 | Density-matching alkyl push flow for vertical flow rotating disk reactors | Bojan Mitrovic, William E. Quinn, Eric A. Armour | 2015-03-17 |
| 8937000 | Chemical vapor deposition with elevated temperature gas injection | Mikhail Belousov, Bojan Mitrovic | 2015-01-20 |
| 8895107 | Chemical vapor deposition with elevated temperature gas injection | Mikhail Belousov, Bojan Mitrovic | 2014-11-25 |
| 8603248 | System and method for varying wafer surface temperature via wafer-carrier temperature offset | Eric A. Armour, Richard A. Hoffman, Jonathan Cruel | 2013-12-10 |
| 8460466 | Exhaust for CVD reactor | — | 2013-06-11 |
| 8287646 | Gas treatment systems | Bojan Mitrovic, Eric A. Armour | 2012-10-16 |
| 8152923 | Gas treatment systems | Bojan Mitrovic, Eric A. Armour | 2012-04-10 |
| 7276124 | Reactor having a movable shutter | Scott Elman, Keng Moy, Vadim Boguslavskiy | 2007-10-02 |
| 7235139 | Wafer carrier for growing GaN wafers | Vadim Boguslavskiy, Richard A. Stall | 2007-06-26 |