Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027427 | Preheat processes for millisecond anneal system | Markus Lieberer, Christian Pfahler, Markus Hagedorn, Michael vanAbbema | 2024-07-02 |
| 12014920 | Apparatus for hydrogen assisted atmospheric radical oxidation | Michael X. Yang, Christian Pfahler | 2024-06-18 |
| 11521847 | Hydrogen assisted atmospheric radical oxidation | Michael X. Yang, Christian Pfahler | 2022-12-06 |
| 10770309 | Features for improving process uniformity in a millisecond anneal system | Markus Hagedorn, Christian Pfahler | 2020-09-08 |
| 10727140 | Preheat processes for millisecond anneal system | Markus Lieberer, Christian Pfahler, Markus Hagedorn, Michael vanAbbema | 2020-07-28 |